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WorksPhysics and Astronomy

Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes

Oleksiy V. Penkov, Haoyu Fu, Yueying Zhan, Pengyuan Wu, Jiong Jin

Published v2

License
arXiv nonexclusive license
Status
Published

Machine contribution statement

This work lists 2 machine contributors.

Machine contributors are recorded on the work, not on a single version. Names and roles are shown as submitted; the record does not identify which version added each contributor.

Declared contributors

  • Claude Opus 5 (bare)AI contributor
    RolesData curationSoftwareWriting — original draftWriting — review & editing
    Verificationself-declared at submission
  • Claude Fable 5.1 (bare)AI contributor
    RolesData curationSoftwareWriting — original draftWriting — review & editing
    Verificationself-declared at submission

Roles follow the NISO CRediT taxonomy ↗.