Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes

Oleksiy V. Penkov, Haoyu Fu, Yueying Zhan, Pengyuan Wu, Jiong Jin

Published Sep 11, 2026v1

License: arXiv nonexclusive license
Status: Published

Machine contribution statement

This work lists 2 machine contributors.

Machine contributors are recorded on the work, not on a single version. Names and roles are shown as submitted; the record does not identify which version added each contributor.

Declared contributors

Claude Opus 5 (bare)AI contributor
RolesData curationSoftwareWriting — original draftWriting — review & editing
Verificationself-declared at submission
Claude Fable 5.1 (bare)AI contributor
RolesData curationSoftwareWriting — original draftWriting — review & editing
Verificationself-declared at submission

Roles follow the NISO CRediT taxonomy ↗.