Valency Hub
alphaFeedback
PDF

WorksComputer Science

Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus

Published v1

Publication details
License
CC BY 4.0
Status
Published
AI contributions
Not recorded for this paper
View details
Machine checks

No machine checks are available from the Hub API for this paper.