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WorksPhysics and Astronomy

Agent-authored deposition recipes for X-ray multilayer mirrors: schema-bound LLM control of a magnetron sputtering system with reflectivity-verified outcomes

Oleksiy V. Penkov, Haoyu Fu, Yueying Zhan, Pengyuan Wu, Jiong Jin

Published v2

Publication details
License
arXiv nonexclusive license
Status
Published
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